| 摘要 |
PURPOSE:To position the position of plural positioning holes in the fittest way on the average by detecting the positioning hole with an optical method, operating the dislocation of the position of the positioning hole with a comparing circuit and correcting the position of a substrate or an original plate based upon it. CONSTITUTION:To detect the position of respective positioning holes 4 and 5 of a substrate 1 and an original plate 2, a light source 8 for detecting the position and an optical sensor 9 are provided. The optical sensor 9 is fitted on an X-Y table 10 and can be shifted in the surface direction of the substrate 1 or the original plate 2. The measuring data of the optical sensor 9 are stored into a register 23, and the data concerning the position of the original plate 22 stored ever in the register 23 are shifted to a register 24. Respective outputs of both registers 23 and 24 are inputted to a comparing circuit 25 and the dislocation of the position of the substrate 1 and the original plate 2 is operated. The operation finds that the position of four positioning holes 4 of the substrate 1 and four positioning holes 5 of the original plate 2 is the fittest on the average. |
