| 摘要 |
PURPOSE:To prevent the damage of a semiconductor product being loaded, to reduce the useless addition of stress and to display the characteristics of a special floor effectively for a prolonged term by obviating dynamic vibrations. CONSTITUTION:For setting a production line in a predetermined area, processes required for manufacturing a semiconductor are partitioned at every process in which necessary cleanliness is arranged approximately, and production units taking charge of the processes are disposed in response to the partition and a plurality of steps are formed. A buffer function adjusting a feed rate, etc. in consideration of the capacity of the projection units is provided particularly. A trackless trolley type cast is applied on the supply of materials to each production unit and the carrying of products and cleanliness is maintained, and the floor 43 on which the production line is installed is constituted of a plurality of detachable panels 44 in prescribed size, and pipings and wirings required are received under the floor, thus preventing the generation of dust by the travelling of a trackless trolley type cart. Wheels 47 for the trackless trolley type cart 46 are placed on two panels and their own weight is dispersed, thus preventing vibrations.
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