| 摘要 |
PURPOSE:To correct the temperature of a part of a furnace core tube very easily by a method wherein an inner chamber, having a plurality of small holes through which circulating gas is jetted out to outside the furnace core tube, and an outer chamber in which a gas temperature controlling fluid is circulated are provided. CONSTITUTION:A cylindrical dual chamber 8 is composed of an outer chamber 8a and an inner chamber 8e. Cooling water 8b flows in from the lower pipe 8c, and it flows back to the upper pipe 8d from the chamber 8a. Compressed air 8f is jetted out toward a sealing tape from innumerable small holes 8g provided on the outside wall of the chamber 8e. As a result, a tape 7, a polycrystalline silicon pipe 2 and an end cap 5b are cooled by the compressed air 8f, and the thermal deterioration of the tape 7 can be prevented. Accordingly, the temperature of a part of a furnace core tube 2 can be corrected very easily.
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