| 摘要 |
PURPOSE:To detect a defect with high precision by removing the component of diffracted light due to the flaw of surface polishing from receiving light through a space filter by the 1st optical system. CONSTITUTION:When the kind of a body to be inspected is specified and specification information on the object of inspection is read in form a console panel 170, a turn-on instruction for a clutch 112 is outputted to a driving circuit 164 to turn on the clutch 112 if the object of inspection which is polished linearly in one direction is specified. Then, a driving circuit 166 drives motors 32 and 33 to start a spiral scan on the surface of the object of inspection. The 1st optical system is provided with the space filter and removes the component of diffracted light due to a flaw of polishing. The code of a defect decision signal is 00 when there is no defect at the scanning point, 01 when there is a projection defect, and 01 when there is a recessed defect; and it is counted by counters N, N1, and N2 and when the counted values are all below a decision threshold value, acceptance is displayed on the console panel 170. |
