FORMATION OF ELECTRICALLY CONDUCTIVE GRAPHITE FILM

摘要

PURPOSE:To form a graphite film having superior electric conductivity by subjecting a hydrocarbon as starting material to plasma discharge and heat treating the resulting carbon film. CONSTITUTION:A substrate contg. Cr or Ni is placed in a synthesis chamber and heated to >=1,000 deg.C. Vapor of a hydrocarbon such as benzene is introduced into the chamber. A high frequency electric field is applied to cause a plasma reaction and a carbon film having metallic luster is formed on the substrate by the plasma reaction. The carbon film is then heat treated at >=1,500 deg.C and doped with a dopant as required. The substrate is preferably made of stainless steel. By this method, a graphite film having superior electric conductivity can be formed by heat treatment at a low temp.