| 摘要 |
PURPOSE:The titled device capable of uniformly producing an electron avalanche phenomenon oven the whole discharge range, keeping stable, short-time electrical discharge, suppressing arc discharge and improving electrical power ratio, by impressing pulse voltage to between discharge electrodes when seed electrons are approximately diffused into discharge space. CONSTITUTION:When an electrical source device 1 is operated and pulse voltage 19 is impressed to a cathode 14, seed electrons 20 are passed through an electron beam taking window 12 and holes 4 and diffused into discharge space 6. When 10-100 nanoseconds passed after voltage is impressed to the cathode 14, delayed pulse voltage 22 having passed through an voltage impression delay device 9 is impressed to the electron beam taking window 12 and a negative electrode 3 and extremely short-time discharge is generated between the electron beam taking window 12 and an earthed positive electrode 2. In the operation, an abrupt electron avalanche phenomenon is uniformly produced from the seed electrons 20 as starting points, stable electrical discharge is continued for a short time and arc discharge is suppressed. Ozone is formed from an oxygen gas or air flowing in the discharge space and taken out from a taking outlet 8 to the outside.
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