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发明名称
摘要
申请公布号
DE3138362(C2)
申请公布日期
1987.06.04
申请号
DE19813138362
申请日期
1981.09.26
申请人
TELEFUNKEN ELECTRONIC GMBH, 7100 HEILBRONN, DE
发明人
BERGER, ANDREAS, ING.(GRAD.), 7104 OBERSULM, DE
分类号
H01L21/027;H01L29/06;(IPC1-7):H01L21/60;H01L21/28;H01L21/308
主分类号
H01L21/027
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代理人
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