| 摘要 |
PURPOSE:To restrain the generation of chipping or deposition of foreign matters on a wafer by making it possible to open and close one end of a wafer holder by a holder operating click of a transferring hand and providing a pair of clamping clicks to clamp a wafer by their open and close operations. CONSTITUTION:Lower ends of a holder opening clicks 4 push down corresponding arms 7 respectively with a descent of a lifting shaft 2. Also, a clamping click 13 is attached to a lower end of a support 12. A movable part 1 is moved close to a fed wafer 5. At this time, a pair of clamping clicks 13 are kept open and after is reaches a predetermined position, the clamping clicks 13 are closed slowly to clamp the wafer 5. After that, the movable part 1 is put on a wafer mounting table of a vapor deposition device and the holder operating click 4 is lowered and the arm 7 of a holder 6 is pushed down to open the holder 6. By further lowering the movable part 1 to bring the wafer clamped by the clamping clicks 13 to a hold position on the wafer mounting table. Next, when the lifting shaft 2 is raised slowly, a moderate rise of the holder operating click 4 causes the holder 6 to close moderately, so that the holder 6 holds the wafer 5 in a holding groove 17 gradually.
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