| 摘要 |
PURPOSE:To make it possible that high voltage low current acceleration and low voltage high current acceleration can be performed by the same power supply, by switching the arrangement of a plurality of power supplies arranged for performing high voltage low current acceleration during acceleration of charged particles to the arrangement for low voltage high current acceleration during deceleration thereof through changing the power supply connection. CONSTITUTION:During extracting acceleration, a power supply A is employed for an extracting power supply 5 and two power supplies B connected in parallel to reach other and employed for an accelerating power supply 6. And during extracting deceleration, the power supply A and B connected in parallel to each other are used for a power supply 8 and the power supply B is used for a power supply 9. In the case where the power supplies are employed in forms of aforementioned connections, the power supply 8 operates during extracting deceleration as a power supply of 60kV and 75mA by the power supplies A and B, and the power supply 9 supplies the extracting voltage for a beam 11 applied to an extracting electrode 2 so that an extracting beam current can be increased one and a half times. Furthermore, power supplies of the same size may be used although the extracting beam amount is increased as mentioned above.
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