发明名称 MEASUREMENT FOR DISCHARGE POWER OF SILENT DISCHARGE SYSTEM LASER
摘要 PURPOSE:To make it possible to measure the discharge power on the basis of the area of a Lissajous's figure and the frequency of the power source by finding the area of the Lissajous's figure with the quantity of charge and discharge voltage of the capacitor to be charged with a discharge current as its parameters. CONSTITUTION:A dielectric or dielectrics 5 is/are applied on one side or both sides of electrodes 3 and 4 arranged facing each other in a vacuum container 2 in a silent discharge system laser 1. Therefore, when a high-frequency electric field (its frequency is 100kHz, for example) is made to act between the electrodes 3 and 4 using a power source 7 in a state that laser medium gas is flowing in a discharge region 6, the so-called silent discharge is generated between the electrodes 3 and 4. As this silent discharge makes the laser medium gas excite, a laser oscillation is generated in an optical resonator consisting of a totally reflecting mirror 8 and a partially reflecting mirror 9 and part of the oscillating light is taken out as a laser beam 10 through the partially reflecting mirror 9. The discharge power of such a silent discharge system laser is found on the basis of a Lissajous figure.
申请公布号 JPS62122188(A) 申请公布日期 1987.06.03
申请号 JP19850261721 申请日期 1985.11.21
申请人 KOMATSU LTD 发明人 UBAHARA JIYUN;EGAWA AKIRA;MIZOGUCHI KAZU;MATSUNO KIYOO;ARIGA TATSUYA
分类号 H01S3/00;H01S3/0975 主分类号 H01S3/00
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