| 摘要 |
PURPOSE:To obtain a magnetic pole having excellent corrosion resistance by adding a specific compsn. ratio of chromium (Cr) to a soft magnetic film of cobalt zirconium (CoZr). CONSTITUTION:The thin soft magnetic alloy film to be utilized for the magnetic pole of this magnetic head is constituted by disposing the chromium 5 on an alloy target 4 consisting of the cobalt zirconium stuck to a sputtering electrode 2, executing film formation by sputtering and forming the thin cobalt zirconium chromium film on a substrate 6 in such a manner that x=1.2-5.4(wt%) is attained in the compsn. (Co94.5Zr5.5)100-xCrx. The chromium 5 is uniformly disposed and is subjected to sputtering. The surface of the cobalt zirconium chromium film is coated with extremely thin oxide film of the chromium having the excellent corrosion resistance and therefore, the corrosion resistance is improved.
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