| 摘要 |
PURPOSE:To obtain an efficient method and an equipment for generating negative ions by irradiating gas molecule with light, thereby generating atoms, and irradiating the generated atoms with a low energy electron beam, attaching electrons to said atoms, thereby generating negative ions. CONSTITUTION:Chlorine gas is made flow in from a gas inlet 11 and at the same time the chlorine gas in a silica tube is irradiated with ultraviolet light by an ultraviolet light source 14. Then the chlorine gas is decomposed, becoming chlorine atoms. At this time, the interior of a vacuum chamber 15 for generating negative ions is exhausted by a pump 19 and two vacuum vessels of the silica tube 13 and the vacuum chamber 15 for generating negative ions are operated in the form of differential exhaustion. Therefore, the chlorine atoms in the silica tube 13 are emitted into the vacuum chamber 15 for generating negative ions through a small hole 16 equipped between the silica tube 13 and the vacuum chamber 15 for generating negative ions. There is irradiated with electron beam emitted from a low energy electron gun 17 equipped within the vacuum chamber 15 for generating negative ions. Since the energy of this electron beam is low, the chlorine atoms emitted from the small hole 16 is effectively attached electrons to and become negative chlorine ions.
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