| 摘要 |
PURPOSE:To improve doping controllability and to reduce nonuniformity in the characteristics of a light-emitting element, by using an addition substance composed of an organic metal compound of specified group II element and an organic compound containing group V element when an N-tyep ZnSy Se1-y layer is prepared in a manufacturing method of a semiconductor light-emitting element emitting blue light. CONSTITUTION:When an N-type ZnSySea-y layer is prepared by a method of organic metal vapor-phase pyrolysis, an addition substance formed of an organic metal compound of II-group element expressed by a general formula MR1R2R3 (M=Al, Ga, In: R1-R3 are alkyl) as a source of a group II element and of an organic compound containing a group V element expressed by a general formula M'R1'R2'R3' (M'=N, P, As: R1'-R3' are alkyl), e.g. (CH3)3 or the like, is used. The addition substance formed in this way has lower reactivity than the organic metal compound and thus it is reluctant to react with oxygen, H2O, etc. Moreover, it is dissociated by heat to produce the organic metal compound of group II element and the organic compound of group V element. The organic compound of the group V element produced by the dissociation of the addition substance is very stable thermally and has no effect on the growth of ZnSySe1-y. |
