发明名称 |
OPTICAL TYPE SURFACE-CONTOUR MEASURING DEVICE |
摘要 |
An optical height measuring arrangement is described in which the radiation reflected from the surface to be measured is projected towards a position-dependent radiation-sensitive detection system via a lens system. The direction of the beam which is incident on the surface is varied at a high frequency and the amplitude of the output signal of the detection system is a measure of the distance to be measured. When two detection systems are employed it is also possible to measure the surface roughness. |
申请公布号 |
JPS62121305(A) |
申请公布日期 |
1987.06.02 |
申请号 |
JP19860272036 |
申请日期 |
1986.11.17 |
申请人 |
PHILIPS GLOEILAMPENFAB:NV |
发明人 |
HENRIKASU MATEIASU MARIA KESEERUSU |
分类号 |
G01B11/24 |
主分类号 |
G01B11/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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