| 摘要 |
PURPOSE:To enable a machined hole to be correctively moved onto an axis of light from a light source further a position of the machined hole to be measured, by detecting the position displacement of the machined hole from a difference between four kinds of light receiving signals of a light receiving sensor after a substrate is initially moved. CONSTITUTION:Position displacement in an X, Y axis direction after the initial movement exceeds permissible ranges DELTAX, DELTAY, and when a position of an insertion hole 9' is displaced from on the axis of light of a light source 16 over the permissible ranges DELTAX, DELTAY, a pulse signal, for moving a table 1 by a unit quantity deltax, deltay in a direction opposite to the direction of the displacement, is output to a motor by action of a correction moving means. Then the position in the X, Y axison of the insertion hole 9' is correctively moved by the unit quantity deltax, deltay. The above action, being repeated, corrects the both position displacements in the X, Y axis directions to be within the permissible ranges DELTAX, DELTAY, and if the insertion hole 9' is positioned on the axis of light of the light source 16, a correction movement is finished. The position of a machined hole is measured from these correction movement data and reference position data.
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