发明名称 |
Method for injecting exotic atoms into a solid with electron beams |
摘要 |
A method for injecting exotic atoms into a solid with electron beams comprises irradiating a material having structure of two layers to which at least one thin film adheres with electron beams, and injecting the exotic atoms into an irradiation region. This method gives desired forms such as crystal, noncrystal, solid solution of the materials, depending on the conditions of electron irradiation.
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申请公布号 |
US4670292(A) |
申请公布日期 |
1987.06.02 |
申请号 |
US19850776520 |
申请日期 |
1985.09.16 |
申请人 |
OSAKA UNIVERSITY |
发明人 |
FUJITA, HIROSHI;SUMIDA, NAOTO |
分类号 |
C23C14/48;C23C8/10;C23C8/60;C23C10/28;C23C12/02;C23C26/00;H01L21/263;(IPC1-7):B05D3/06 |
主分类号 |
C23C14/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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