发明名称 THIN FILM FORMING DEVICE
摘要 PURPOSE:To stabilize an ionization current and voltage characteristics by preventing the deformation of an ionization filament at energizing by supporting the ionization filament by supports. CONSTITUTION:An ionization filament 6 which is nearly U-shaped is supported by a pair of supports 12, 12. A pair of support pins 15, 15 are fixed to the pair of supports 12, 12 respectively by their ends of one side and another end of the respective pin 15 supports the vicinity of bending parts 6a, 6a of the filament 6. Thus, the filament 6 is not only supported at a predetermined position mechanically by the pair of pins 15, but also an increase in temperature in the bending parts 6a, 6a of the filament 6 is restrained because the current flowing through the pins 15, 15 is ramified into the filament 6 and the pins 15, 15. Consequently, the deformation of the filament 6 in the bending parts 6a, 6a due to thermal expansion decreases and besides the thermal expansion of a straight part 6b is diffused in directions x, x, so that the distance between a grid 7 and the filament 6 can be kept constant.
申请公布号 JPS62119916(A) 申请公布日期 1987.06.01
申请号 JP19850258488 申请日期 1985.11.20
申请人 MITSUBISHI ELECTRIC CORP 发明人 ITO HIROMOTO
分类号 H01L21/285;C23C14/32;H01L21/203;H01L21/26 主分类号 H01L21/285
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