| 摘要 |
PURPOSE:To lower the coefft. of thermal expansion of a thin Fe-Si-Al alloy film and to improve the magnetic characteristics by adding specified amounts of Ta and a rare earth element to a material for the alloy film. CONSTITUTION:The alloy composition of a material for a soft magnetic thin film is composed of, by weight, 2-8% Si, 0.5-2.5% Al, 0.5-12% Ta, 0.01-2% rare earth element and the balance Fe. Ce may be selected as the rare earth element. A thin alloy film made of the material has a low coefft. of thermal expansion, so it has superior adhesion to a substrate and increased mechanical strength. The film also has high magnetic permeability and superior corrosion resistance.
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