| 摘要 |
PURPOSE:To perform the high speed driving of an analysis grid, by unifying an input impedance from a feeder for supplying the high frequency voltage to the analysis grid, to the terminal resistance of the analytic grid, thereby performing an impedance matching. CONSTITUTION:An electron beam 7 is irradiated to a sample 6 through an analysis grid 11 and a secondary electron radiated from the sample 6 is detected by a detector 9 so as to perform an energy analysis. Then, a coaxial cable is served as a feeding wire 15 connected with the analysis grid 11 and a terminal resistance for impedance matching is connected with the terminal of the coaxial cable. And, the characteristic impedance is selected to be equal with the input impedance of a buffer amplifier 16 which is a high frequency voltage feeding means so as to perform an impedance matching. Therefore, it is possible to prevent the reflection or the like and enhance the changeover frequency of the voltage applied to the analysis grid 11, thereby the energy analysis at high speed is accurately performed.
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