| 摘要 |
PURPOSE:To release the tolerance of accuracy in case of a working assembly, to improve the yield,and to reduce a product cost by attaching a diaphragm part to a detecting part body so that its opposed separation distance to a fixed electrode plate can be adjusted freely. CONSTITUTION:In a flow rate detecting part 31, elastic members 33a, 33b re provided between metallic diaphragm parts 32a, 32b and fixed electrode plates 18a, 18b. In this case, the electrostatic capacity of capacitors 35a, 35b can be adjusted by pressing the metallic diaphragm parts 32a, 32b and displacing them. Also, at the time of an adjustment, even when the metallic diaphragm parts 32a, 32b are presed to the inner part than a suitable adjustment position, the metallic diaphragm parts 32a, 32b are pushed back by the elastic restoring force of the elastic members 33a, 33b, and the metallic diaphragm parts 32a, 32b can be exactly and easily positioned at the suitable adjustment position.
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