| 摘要 |
PURPOSE:To form a crystalline thin film with excellent quality by means of activating molecular beams with ultraviolet ray irradiation from an ultraviolet ray lamp. CONSTITUTION:A material contained in a crucible 2 is heated by a conducted heater 1 to evaporate the vapor thereof. At this time, any monomer solid material used as the material of V group element is evaporated as vapor of tetramer molecule normally comprising e.g. As4, P4, Sb4, etc. Such a vapor is decomposed or excited while passing through a hollow part of a cylindrical ultraviolet ray lamp 9 into active molecular beams to irradiate a substrate.
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