| 摘要 |
PURPOSE:To catch a foreign material grain stickable on a semiconductor base plate made of silicon from a liquid medichine without relation to size and to produce an excellent semiconductor base material free from pattern fault or the like by providing a silicon plate to the inside of a filter main body. CONSTITUTION:The following filter 7 is provided to the inside of a filter main body 1 wherein the silicon plates 5 provided in a multilayer are fixed with a silicon plate supporter 6. A liquid medichine introduced through a liquid medichine charging port 3 is passed through the slits provided to the suppotor 6 and brought into contact with the silicon plates 5. Herein a foreign material grain contained in the liquid medicine is caught on the silicon plates 5 and the purified liquid medicine is passed through a filtrate path 9 and flowed out through a liquid medichine discharge port 4. The silicon plates are washed by introducing suitably hydrofluoric acid into the inside of the filter or the filter 7 may be made capable of exchange as a cartridge.
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