| 摘要 |
PURPOSE:To prevent the clusters of an evaporated material vaporized in a crucible from dripping inside the crucible on a crucible insulator, etc. making insulation thereof defective even if they stick to electric field relieving filaments by means of forming said filaments into V-shape. CONSTITUTION:Electric field relieving filaments 28 are obliquely formed into V-shape above a crucible 5 to arrange the bottoms of oblique sides on the position immediately above a pore 27 of the crucible 5. In such a constitution, the clusters vaporized in the crucible 5 sticking to the electric field relieving filaments 28 can descend along the V-shape oblique sides dripping on an evaporated material 4 in the crucible 5 through the pore 27 from the bottom so that the clusters may not drip on the peripheral parts of crucible 5 and a crucible insulator 9, etc. thereby making insulation thereof defective.
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