发明名称 Method for selective formation of deposited film
摘要 A deposited film (407) of a desired pattern is formed selectively on a deposition surface (406) comprising a plurality of different kinds of materials (406, 407) formed corresponding to said pattern. The different kinds of material provide different nucleus forming densities. Thus a third material (409) can be self selectively attached to one (407) of the different kinds of material (406, 407) without becoming attached to the other. <IMAGE>
申请公布号 GB2183090(A) 申请公布日期 1987.05.28
申请号 GB19860023956 申请日期 1986.10.06
申请人 * CANON KABUSHIKI KAISHA 发明人 TAKAO * YONEHARA
分类号 H01L21/20;H01L21/3205;H01L21/763;(IPC1-7):H01L21/205 主分类号 H01L21/20
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