| 摘要 |
PURPOSE:To shorten the time of optical axis adjustment by adjusting the 1st and the 2nd inclinations of a substrate so that the integral value of a luminance signal is maximum, and adjusting the optical axis automatically so that the direction of image pickup operation is perpendicular to the measured surface of an object body. CONSTITUTION:An optical axis adjusting mechanism is so constituted that the integral value of odd and even fields is obtained the 1st and the 2nd integrating circuits so that the integral output of the absolute value of an absolute value circuit 15 for the level difference between high frequency components 14 of luminance signals of a solid-state image pickup element 6 at front and rear sampling points and compared 21 and a voltage applied to the 1st laminate type piezoelectric element 7 firstly is controlled by the 1st control voltage circuit 28 to adjust the X-Z directional inclination of the substrate 5. Namely, the inclination of the substrate 5 is adjusted by utilizing the integral output in an in-focus point state to vary the direction between the image pickup surface of the solid-state image pickup element 6 and a sample, thereby adjusting the optical axis. Thus, the optical axia adjusting device which has good operativity is obtained in a short time. |
