| 摘要 |
PURPOSE:To provide read processing of reacting fine particles while in contact with reaction gas on the way of feeding the particles by providing a nozzle in a passage, and providing a magnet for introducing a plasma formed in an upstream chamber to a downstream chamber around the nozzle to prevent the activity from vanishing. CONSTITUTION:A flow controller 7 for fine particles having a vapor-phase exciter comprising a nozzle 1 in a passage and a magnetic for introducing a plasma of the exciter to a downstream side around the nozzle 1 is disposed. The magnet 7 applies a magnetic field of a direction from an inlet 1a to an outlet 1b to a converging and diverging nozzle 1A, may be a permanent magnet or an electromagnetic, one or a plurality of magnets in combination are mounted around the nozzle 1. The magnitude of the magnetic field applied to the nozzle 1A is to satisfy an electron cyclon resonance condition for the frequency of a microwave when forming a plasma by the discharge of a microwave. Thus, the plasma in an upstream chamber 3 is positively introduced into the nozzle 1A. Thus, it can prevent the activity from vanishing due to the contact with the wall of the chamber 3 of the plasma.
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