发明名称 DEFECT INSPECTION DEVICE
摘要 PURPOSE:To improve the reliability of products manufactured on an automatic manufacture line by discriminating between the output signal of a flaw detector which is generated by the shape change of a body to be inspected and a signal generated owing to the presence of a surface defect or defect nearby a surface. CONSTITUTION:An eddy current flaw detection probe 9 for plane inspection is installed nearby the object surface of a body 1 to be inspected which is fixed by the chuck 8 of a turntable 7 and the entire upward object surface of flaw detection is scanned to detect a flaw. The position detector composed of a peripheral encoder 17, up/down encoders 18 and 19, and a radial encoder 20 measures the position of the flaw-detected surface by inspected by the probe 9. A signal processor 21 reads the inspection position while the detection signal from the eddy current flow detector 16 exceeds a threshold value and stores defect position information temporarily until the inspection end of one body to be inspected. Then, a computer 22 discriminates between the output signal based upon a shape discontinuous part stored in the processor 21 and a signal generated owing to a defect on the basis of data on the shape size of the object body and also makes displays 24 and 25.
申请公布号 JPS62115357(A) 申请公布日期 1987.05.27
申请号 JP19850255294 申请日期 1985.11.14
申请人 TOSHIBA CORP 发明人 FURUMURA ICHIRO;NAGAI SATOSHI;HIRASAWA TAIJI
分类号 G01N21/84;G01N27/90 主分类号 G01N21/84
代理机构 代理人
主权项
地址