| 摘要 |
<p>PURPOSE:To obtain the titled film having an excellent orientation property by using the transparent thin film which contains an indium or a tin atom and an oxygen and a carbon atoms. CONSTITUTION:The confronting electrodes 13 and 15 are arranged in the reaction container 11, and a substrate 17 is provided with the electrode 13. The reaction container 11 is made vacuous, and then, the reacting gas which contains the In source, the O source and the C source and if necessary, together with a carrier gas such as an Ar gas coming from the gas bomb group 35 are introduced to the reaction chamber 11 controlling an amount of flow of said gases by means of a flow meter 33. And a liquid such as Sn(CH3)4 and In(C2H5)3 is introduced to the reaction chamber 11 together with the carrier gas from a bubbler 37. The transparent film which contains Sn, O and C atoms or In, O and C atoms is formed on the substrate by forming a plasma with the RF discharge impressing the electric power from the high frequency electric source 21. The obtd. film has the good insulating and transparent properties and also has the excellent orientation.</p> |
