发明名称 MANUFACTURE OF HYBRID INTEGRATED CIRCUIT
摘要 PURPOSE:To perform an excellent bonding even if the surface of a conductor has an irregular surface by pressing a wire bonding forming region of the conductor having the irregular surface by a capillary without hole, forming the region smoothly and densely, and then bonding the wire to the region. CONSTITUTION:A capillary 1 having no hole is pressed to a conductor 2 having an irregular surface prior to a wire bonding, and a load is applied to form the irregular surface smooth and dense. It is effective to achieve an object to apply a supersonic wave simultaneously upon applying of the load. Then a bonding wire is bonded by a normal method to the smoothed surface of the conductor. Thus, the contact of the wire to the conductor is improved to complete a proper connection. Thus, even if the surface of the conductor has the irregular surface, the bonding having excellent bondability can be executed to improve the bonding improper rate.
申请公布号 JPS62115836(A) 申请公布日期 1987.05.27
申请号 JP19850257154 申请日期 1985.11.15
申请人 NEC CORP 发明人 MIYAZAKI HIROSHI
分类号 H01L21/60;H05K3/22 主分类号 H01L21/60
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