| 摘要 |
PURPOSE:To form a leak hole with a desired hole diameter by providing a laser beam machine and an optical hole diameter measuring machine and feeding back the output of the laser working machine according to the hole diameter. CONSTITUTION:A light beam emitted by the laser beam machine 15 and a light beam emitted by a light emitting device 21 travel in the opposite directions across a diaphragm 2. The optical axes of both light beams are set coaxial and the leak hole 5 is bored in the diaphragm 2 by the laser beam machine 15, so that the radiant light beam from the light emitting device 21 is allowed to pass through the hole 5. The light beam having passed through the hole 5 passes through a condenser lens 17 and is transmitted through a dichroic mirror 16. Then, the light is converged by a condenser lens 24, reflected by a reflection mirror 25, and photodetected by a photodetector 22. Then, the hole diameter of the hole 5 is detected from the output corresponding to the quantity of photodetection. Thus, the hole diameter is measured simultaneously with the boring of the hole 5, and the output of the laser beam machine 15 is brought under feedback control with the output of a photodetector 22 to bore the hole 5 to desired size automatically.
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