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发明名称
VAPOR PHASE EXCITER
摘要
申请公布号
JPS62115700(A)
申请公布日期
1987.05.27
申请号
JP19850254836
申请日期
1985.11.15
申请人
CANON INC
发明人
ANDO KENJI;KAMIYA OSAMU;SUGATA MASAO;KURIHARA NORIKO;SUGATA HIROYUKI;DEN TORU
分类号
H05H1/46;H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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