| 摘要 |
PURPOSE:To make it possible to uniformly distribute a stabilizer throughout a solid electrolyte film membrane in the thickness direction thereof, by forming the solid electrolyte membrane under such a condition that growing temp. is 550-1,000 deg.C and stabilizer adding concn. is 6.1-12.6mol%. CONSTITUTION:An aluminum nitride membrane 2 is formed on a substrate 1 and a stabilized zirconia membrane 3 is subsequently formed to the surface of the membrane 2 in the opposite side of the substrate 1. The stabilized zirconia is formed by a method wherein 6.1-12.6mol% of a stabilizer comprising metal oxide such as Y2O3 is added to ZrO2 being a solid electrolyte and the whole is heated under an atmosphere with growing temp. of 550-1,000 deg.C. By this membrane 3, a manufacturing process is simplified and the molecule of the stabilizer is not scattered during the manufacturing of the membrane 3 and it can be prevented that non-uniformity in a thickness direction is generated in the componential ratio of the stabilizer. Next, an electrode 4 is provided to the surface of the membrane 3. Thereafter, SiO2 5 is formed to the side opposite to the membrane 3 as a mask and anisotropic etching is performed to provide a through-hole 6 reaching the surface in the opposite side of the electrode 4. An electrode 7 is formed so as to cover the through-hole 6 to constitute a detection element 8. |
