| 摘要 |
PURPOSE:To control to uniformly blow fine particles in the case of blowing the particles to a substrate by providing a converging and diverging nozzle in a passage, and supplying a reaction gas between the vicinity of the inlet and the throat of the nozzle. CONSTITUTION:A converging and diverging nozzle 1 is provided in a passage to supply a reaction gas from the vicinity of the inlet 1a to the throat 2 of the nozzle 1. When a carrier gas in which fine particles are dispersed and floated is supplied into an upstream chamber 3 and a downstream chamber 4 is evacuated by a vacuum pump 5, a pressure difference is generated between the chambers 3 and 4. The gas including the supplied particles is fed from the chamber 3 through the nozzle 1 to the chamber 4. When a reaction gas is supplied from the vicinity of the inlet 1a to the throat 2 at this time, the gas is supplied to the accelerating region of the nozzle. The flowing state of the particle stream maintains a state determined by hole area ratio A/A* by holding the pressure ratio P/P0 to the pressure P of the chamber 4 to the pressure P0 of the chamber 3 when the temperature of the chamber 3 is constant. When the gas is injected in the state that the pressure ratio is less than the critical pressure ratio, the particles can be uniformly blown.
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