| 摘要 |
PURPOSE:To attain the fine adjustment feed of a sample stage with high accuracy, and to improve the operability of a circular flat spring working by arranging a piezoelectric actuator which contract/expands with a voltage impression at a parallel flat spring mechanism which supports the sample stage. CONSTITUTION:When a piezoelectric actuator 3 is contracted with the voltage impression, a thin spring part 27 continued through the actuator and the first rigid body part 26 is bent, and simultaneously, a pulling stress is applied on a belt shaped spring part 24, and a flexural rigidity, that is a spring constant, is made large. When the spring constant becomes large, the balancing states of bendings of the spring parts 23 and 24 at each of circular flat springs 2a, 2b, and 2b is shifted compared with the balancing state before the operation of the actuator 3, and the shifted quantity becomes an up/down micro displacement quantity H. Therefore, by the contracted and the expansion of the actuator 3, the outer ring rigid body part 22 of a parallel flat spring mechanism 2 is adjusted finely in up and down, and a sample stage 1 fixed and supported on the mechanism is adjusted finely in up and down. Also, the high accuracy is not required for the working and the assembling of the springs 2a and 2b, and the operability can be improved. |
