| 摘要 |
PURPOSE:To prevent bacteria from breeding in a pipe by supplying pure water into a pure water pipe when a pouring port is closed with a plug when blowing the pure water from the port to the surface to be treated. CONSTITUTION:When cleaning a wafer, pure water is fed from a supply port 10 through a first, second and third 3-way valves V1, V2, V3, an openable valve V5, a filter 9 via a pipe 7 to be blown to the wafer from a pouring port 8, and further fed from the second 3-way valve V2 through a manifold 14 to other plurality of pouring ports. When a pure water is blown intermittently from the port 8, the valve V5 is closed to supply the water from a supply port 10 through the pipe 7, via the valve V3 to the fourth 3-way valve V4 via the first bypass tube 11 to an exhaust port 10 to be recovered. Accordingly, the pure water is always fed from the valve V1 to the valve V3 irrespective or the open or close of the port 8 to shorten the pure water retaining time in the pipe 7 so that bacteria are hardly bread therein.
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