发明名称 |
Target plate for cathode sputtering |
摘要 |
In conventional attachments of target plates for cathode sputtering the danger always existed that they will become plastically deformed at the operating temperature and detach from a cooling support. For secure attachment without fastening means on the front side to be disintegrated, the target plate according to the invention presents on its back a cutout (4) in which there is inserted by means of a mechanical spring union, e.g. by means of a lock ring (8), an auxiliary body (6) of a material of higher strength and higher softening point than the material to be disintegrated, which body has a threaded bore (12) for attachment of the target plate on a support (1).
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申请公布号 |
US4668373(A) |
申请公布日期 |
1987.05.26 |
申请号 |
US19850756050 |
申请日期 |
1985.07.17 |
申请人 |
BALZERS AG |
发明人 |
RILLE, EDUARD;KAISER, ERICH;GRUENENFELDER, PIUS |
分类号 |
C23C14/34;H01J37/34;(IPC1-7):C23C14/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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