| 摘要 |
PURPOSE:To enhance a static thrust and precision, by forming two rugged rows of a stator with positionally shifted phase, and by arranging the rows in a specific manner. CONSTITUTION:A mover 1 is organized with a permanent magnet 2, U-formed magnetic members 3, 4 fitted on the both sides of the magnet 2, and exciting coils 5, 6 wound up respectively on the members 3, 4. On a stator 8, two rugged rows 9, 10 shifted positionally by 1/4 pitch (phase, 90 deg.) against one pitch of the rugged sections are formed. The rugged rows 9, 10 consist of a plurality of concave sections and convex sections repeated at a specified pitch. Besides, on the mover 1, vertically to the advancing direction, the magnetic member 3, the permanent magnet 2, and the magnetic member 4 are arranged, and the rugged section of the magnetic member 3 approaches the confronts the rugged row 9 and the rugged section of the magnetic member 4 approaches the confronts the rugged row 10, respectively. Then, the unbalance of a magnetic circuit between magnetic pole teeth is remedied, and the distortion or the like of the mover 1 can be eliminated.
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