| 摘要 |
PURPOSE:To make simultaneous suction for a thin carrier and a thin work performable in an accurate manner, by installing each spring between a robot underside equipped plate and a suction pat as well as between this equipped plate and a remedy reinforced plate, respectively. CONSTITUTION:Robot head turning is carried out by timing pulleys 13 and 3 and a belt under control of a servomotor 14. And, an equipped plate 2 is locked to a main shaft 5 while a remedy reinforced plate for carrier suction is locked to this equipped plate 2 by a well-balanced setting metal device 11 and a spring 16, and plural pieces of pats 10 and 15 are locked to the equipped plate 2 via a spring. Phasing for a work hole of a carrier is able to detects the marker hole X installed in an eccentric position of the carrier by the sensor equipped at the same related position at the robot underside and perform congruity between the carrier and a robot suction center.
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