| 摘要 |
PURPOSE:To form a contact section with a substrate to a fine shape, and to shape an electrode having low electric resistance by forming a fine unfinished electrode, shaping a resist film onto the unfinished electrode again, extending an electrode onto the unfinished electrode and acquiring a T-shaped finished electrode. CONSTITUTION:A resist film 2 is applied onto a substrate 1, and a resist-film opening section 4 is formed. The resist film 2 is removed, and an electrode pattern 5b is shaped through a lift-off method. The sectional shape of the pattern 5b takes a triangle, and the pattern 5b has a high resistance value and is brought to an unfinished state. A resist film 6 in thickness higher than the height of the unfinished electrode 5b is shaped, and a resist-film opening section 8 is formed. The top section of the unfinished electrode 5b is exposed to the bottom of the opening section 8. An electrode material layer 9 formed in the opening section 8 is connected to the unfinished electrode 5b, thus consisting a T-shaped finished electrode 10. Accordingly, the electrode having the fine size of a contacting section and low electric resistance is obtained.
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