| 摘要 |
PURPOSE:To obtain an excellent magnetic disk having high output and electromagnetic conversion characteristic by executing sputtering in a gaseous Ar atmosphere contg. gaseous H2 to form a thin magnetic metallic film on a substrate. CONSTITUTION:A target 3 which is connected to a cathode and to which a negative high voltage is impressed and the substrate 1 are disposed to face each other in a vacuum bell-jar 2. A shutter 4 is closed in the stage of starting electric discharge and after the stains on the surface of the target 3 are preliminarily washed off, prescribed sputtering is executed. Gaseous Ar and H2 are mixed at 6:4 proportion and are introduced from cylinders 5, 6 for both gases into the vessel 2 and the Co-Ni magnetic layer having 500Angstrom film thickness and carbon protective layer having 300Angstrom film thickness are formed on the substrate 1. The thin magnetic metallic film having the high residual magnetization quantity and excellent coercive force and squareness ratio is formed by the formation in a reducing atmosphere in the above-mentioned manner, by which the magnetic disk having the high output and excellent electromagnetic conversion characteristic is obtd.
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