发明名称 CONTROL OF CLEAN ROOM
摘要 PURPOSE:To contrive a reduction in energy consumption, by measuring the integrated value of the kinetic momentums of objects moving in a room by a photosensor, and controlling outside-air intake quantity and circulatory ventilation quantity based on the measured value. CONSTITUTION:An SFD photosensor 31 is provided in a room 5. This photosensor comprises silicon solar cells having P-type material members arranged on the surface of an N-type silicon substrate, and measures the integrated value of the kinetic momentums of workers 6 and various apparatus 15. The measured value is inputted to an amplifier 32, the amplified quantity is inputted to a microcomputer 34 through an A/D converter 33, and fans 1A and 9 are controlled based on the measured integrated value of the kinetic momentums to control outside-air intake quantity and circulatory ventilation quantity. The dust concentration C in the room 5 is controlled by controlling the circulating air quantity based on the quantity of dust generated in the room, and the pressure in the room is maintained at a constant value by such a proportional control that the outside air intake quantity (QF) and exhaust quantity (QF') become approximately equal to each other. By this, energy consumption can be reduced.
申请公布号 JPS62112940(A) 申请公布日期 1987.05.23
申请号 JP19850252201 申请日期 1985.11.11
申请人 MITSUBISHI HEAVY IND LTD 发明人 MATSUMOTO KAZUHIRO;KAWADA NORIYUKI;YOSHIDA TETSUO
分类号 F24F7/06;F24F3/16 主分类号 F24F7/06
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