LOT ORGANIZING DEVICE FOR SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE:To organize an accurate lot and to improve the productivity in the manufacturing process on a multi-product and small-lot production basis by a method wherein the organization of a lot corresponding to every semiconductor substrate is done by a lot organizing device having an unloading mechanism, a transfer mechanism and so on. CONSTITUTION:Identification A marks or characters 3 are marked on wafers 2 to be used as semiconductor substrates which are transferred in a lot unit by a transfer mechanism 5 of a semiconductor organizing device. An unloading mechanism 4 is disposed on the transfer base end side of this mechanism 5, the wafers 2 housed in cases 1 are loaded one sheet by one sheet on the mechanism 5 by the mechanism 4 and the characters 3 of the wafers 2 being transferred by the mechanism 5 are read out by an identification reader 6. Moreover, a loading mechanism 6 corresponding to the lot unit is provided on the transfer terminal side of the mechanism 5, the movement of the mechanism 5 is stopped at the position of the mechanism 7 on the basis of the characters 3 read out by the reader 6, the organization of the wafers 2 is executed by the mechanism 7 and the wafers are housed in the desired cases 1.