| 摘要 |
PURPOSE:To prevent any breakdown, wear and deterioration in precision in alignment of guide posts etc. from occurring by a method wherein contact board for coupling with outer device are held by flexible supports to be made movable in the facial direction of the contact boards. CONSTITUTION:A head 10 is provided with a performance board 12 and a contact board 14. The board 12 is fixed on a a box body not shown in figure by screw etc. while electronic parts and connectors are fixed on the backside of board 12. On the other hand, the board 14, flat ring type, is provided with numerous contacts on the surface. In the head 10, the board 14 is held by the board 12 using flexible supports 18. Resultantly, the head 10 and an external prober 40 need not be aligned with each other so precisely since any positional slip can be absorbed in the movement of board 14 in facial direction so that guide pots 49 and a guide post receiver 16 may be prevent from breaking down or rapid wearing without resorting to excessive force.
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