| 摘要 |
PURPOSE:To oscillate a laser light suitable for reduction projection by constituting a light source with a means which oscillates an incoherent ultraviolet laser light and a wavelength selecting means which narrows the spectrum line width of the ultraviolet laser light and narrowing the spectrum line width while keeping the incoherent property. CONSTITUTION:A solid etalon 4 is placed on the outside of the cavity of an excimer laser provided with a resonator consisting of a total reflection mirror 1 and an output mirror 2, and the laser light oscillated by the resonator is allowed to pass the solid etalon 4. The spectrum line width of the laser light which passes the solid etalon 4 as the wavelength selecting element is narrowed by the transmission characteristic of the solid etalon 4. A mixed gas of argon and fluorine, a mixed gas of krypton and fluorine, or the like is filled up in a chamber 3. This excimer laser has a short wavelength (193mm for ArF and 248mm ultraviolet for KrF) and has the incoherent property essentially.
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