| 摘要 |
<p>PURPOSE:To remove chlorine or the like without using water by constituting the titled apparatus of a reaction apparatus wherein an exhaust gas contg. chlorine or the like is brought into contact with an iron catalyst in the high- temp. atmosphere and an apparatus cooling produced iron chloride and a dust collector recovering iron chloride from a waste gas. CONSTITUTION:When introducing an exhaust gas contg. about 10% chlorine or the like discharged from a semiconductor manufacturing apparatus into the inside of a reaction vessel 1, a catalyst layer 4 and the exhaust gas are heated about at >=350 deg.C by a heating means 5 and chlorine contained in the exhaust gas is allowed to react with iron to produce iron chloride. On this occasion, hydrogen chloride is similarly made to iron chloride and iron chloride produced in such a way is introduced into a cooler 6 together with the exhaust gas and herein cooled at <=319 deg.C being b.p. of iron chloride and thereafter introduced into a dust collector 7. Iron chloride pulverized by cooling is collected in the dust collector 7 and the clean exhaust gas is exhausted trough a pump 8.</p> |
