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发明名称
Diffusionsverfahren
摘要
申请公布号
DE1644030(A1)
申请公布日期
1971.03.25
申请号
DE19671644030
申请日期
1967.07.01
申请人
TELEFUNKEN PATENTVERWERTUNGSGESELLSCHAFT MBH
发明人
LANGER,KARL-HEINZ,DIPL.-ING.
分类号
C30B31/16;H01L21/00
主分类号
C30B31/16
代理机构
代理人
主权项
地址
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