NON-CONTACT PLANAR X-Y TABLE

摘要

PURPOSE:To propel a moving body smoothly with a compact and simple structure by a method wherein the moving body is held in non-contact condition by the magnetic forces of attracting poles and propulsion and posture control of the moving body are performed by propulsion guide poles and a control means. CONSTITUTION:A moving body 4 is held in non-contact condition by the magnetic forces of the attracting poles of linear motor poles 2a and 2b. The moving body 4 is propelled by the magnetic forces of the propulsion guide poles of the linear motor poles 2a and 2b. The displacement between a fixed body 1 and the moving body 4 is detected and the exciting currents applied to the attracting poles of the linear motor poles 2a and 2b are regulated in accordance with the detected value to control the posture of the moving body 4.