| 摘要 |
PURPOSE:To obtain a film having no difference in thickness between high and low current density parts with superior uniformity of electrodeposition by using an electroplating soln. contg. a water soluble salt of Ni, Co or Fe, a water soluble halide of an alkali metal, an alkaline earth metal or Al, and boric acid. CONSTITUTION:This electroplating soln. contains a water soluble salt of Ni, Co or Fe, 150-800g/l one or more kinds of electrically conductive salts selected among the water soluble sulfates and sulfamates of alkali metals, alaline earth metals and Al, and boric acid as a buffer.
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