| 摘要 |
PURPOSE:To efficiently fulfill a cushioning function by connecting a check relief valve and a throttle valve to a cylinder chamber on the capacity reducing side accompanying the advance of a piston, in the captioned device for a high speed emergency shut off valve used in an ultra-high vacuum system such as a plasma laboratory device. CONSTITUTION:A check relief valve 54 and a throttle valve 55 are connected to the cylinder chamber 18a on the rod side of a fluid pressure cylinder 1. These valves are opened when the fluid pressure in the cylinder chamber 18a becomes above a set value, with this fluid pressure as a pilot pressure. Thereby, when a piston 13 is advanced at a high speed, the pressure in the rod side cylinder chamber 18a rises, opening the check relief valve 54 to discharge a fluid in the rod side cylinder chamber 18a, via the throttle valve 55, and, thereby, the piston 13 can be smoothly stopped at the stroke end.
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