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发明名称
摘要
申请公布号	FR2052420(A5)	申请公布日期	1971.04.09
申请号	FR19700018638	申请日期	1970.05.22
申请人	IBM	发明人
分类号	C09K13/12;C23F1/00;C23F1/10;C23F1/38;G03C1/72;H01L21/308;(IPC1-7):C23G1/00;H01L19/00	主分类号	C09K13/12
代理机构		代理人
主权项
地址

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